In the field of microelectronics, the term DSM is an abbreviation of Deep Sub-Micron. This is a reference to the ability of modern semiconductor technology, (the process used to fabricate integrated circuits), to define circuit features in silicon with geometries of less than 1 micron.

As semiconductor process technology has progressed to allow such small transistors to be used, more complex digital logic functions are able to be integrated onto a single IC. At the same time, a whole new range of physical factors have to be taken into account during the design stage.